|
週次 |
日期 |
單元主題 |
|
Week 1 |
|
Course info., Introduction |
|
Week 2 |
|
(no class) Prof. Tsai in Adv. Lithography |
|
Week 3 |
|
Nano-CMOS Devices, Processes, Variability |
|
Week 4 |
|
Lithography: Equipment, Process, and Trends |
|
Week 5 |
|
Lithography: Modeling |
|
Week 6 |
|
Lithography: RET (OPC, PSM, DP) |
|
Week 7 |
|
(no class) 春假 |
|
Week 8 |
|
Lithography Friendly Design/P&R/hot spot/LRC |
|
Week 9 |
|
CMP/dummy fill/P&R |
|
Week 10 |
|
Interconnect (1) |
|
Week 11 |
|
Interconnect (2) |
|
Week 12 |
|
DFM: Physical Design Aspects |
|
Week 13 |
|
DFM: Circuit Design Aspects |
|
Week 14 |
|
Summary and Review |
|
Week 15 |
|
(no class) 端午節 |
|
Week 16 |
|
Final Exam |
|
Week 17 |
|
Final project report/presentation 1st version due |
|
Week 18 |
|
Final project report/presentation final version due |